Wafer detection
Use a single fiber sensor for stable wafer detection with difficult surface conditions.
Challenge
The variety of surface conditions on wafers makes stable wafer detection difficult. Some thin-films on wafers absorb a specific wavelength. These wafers cannot be detected by an optical sensor with single wavelength light source.
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Solution
Omron offers a single fiber sensor with white LED emitter and RGB receiver. A wide range of wavelengths enables the differences between surface conditions to be distinguished and all wafers to be detected regardless of the surface condition.
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Benefit
Only processed wafers are transferred and various wafers can be detected with one compact fiber sensor, saving costs and space.
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