Wafer centralization
Use a high-speed CCD to measure accurately and quickly.
Challenge
To centralize the wafer or search for the notch position, the edge position has to be measured accurately and quickly. Even though the wafer is made of shiny silicon or transparent glass, the position has to be the same.
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Solution
The CCD algorithm offers stable and accurate measurement of the edge point. The high-speed CCD allows fast rotation of wafers. Support software enables easy setting-up and monitoring.
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Benefit
Quick and accurate positioning allows through-put improvement while a common design for both silicon and glass wafers is enabled.
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